Semiconductor Microscopes

Semiconductor Microscopes

Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.

  • NWL200

    NWL200

    Advanced IC inspection wafer loader capable of loading 100 µm thin wafers.

  • lv150

    Eclipse LV150 Series

    Modular reflected light microscope systems for 6 inch wafer inspection and materials science applications.

  • l300

    Eclipse L300 Series

    300mm wafer and mask inspection microscope systems for reflected light defect identification.

  • l200

    Eclipse L200 Series

    200mm wafer and mask inspection microscope systems for reflected light defect identification.

  • nwl860

    NWL-860

    IC Inspection wafer loader capable of handling 6 and 8-inch (150 and 200 mm) wafers.

  • nwl641

    NWL-641

    IC inspection wafer loader for 4, 5 and 6-inch (100, 125 and 150 mm) wafers.

  • nis-elements

    NIS-Elements Software

    Combines automated intelligence to microscopes, cameras, components and peripherals with powerful archiving and analysis tools.

  • dart

    DART Software

    Semiconductor wafer inspection software offering features such as image archiving, defect review, post probe review and online communications.