Semiconductor Equipment

Semiconductor Equipment

Nikon is a world leader in the development and manufacture of optical and digital imaging technology for semiconductor and industrial applications. Established in 1917, the Company provides complete optical systems that offer optimal versatility, performance and productivity. Nikon has shown its commitment to the future of the semiconductor industry through its aggressive product development, superior training and technical support.


  • NWL200

    NWL200

    Advanced IC inspection wafer loader capable of loading 100 µm thin wafers.

  • p3

    P3

    Designed for automated pattern profile management and line width roughness monitoring of 300mm wafers.

  • ami3000

    AMI-3000

    Automatic macro inspection system with high throughput and exceptional sensitivity.

  • ost3200

    Optistation-3200

    300mm wafer inspection system featuring Nikon’s renowned CFI60 optics and newly designed DUV microscope.

  • ost3100

    Optistation-3100

    Compact, cost-effective solution for 300mm wafer inspection in diverse applications.

  • ost3000

    Optistation-3000

    An inspection system and analysis tool for R&D defect analysis delivering high-speed transfer and system stability.

  • Optistation-V

    Optistation-V

    Compact wafer inspection solution featuring exceptional accuracy and high throughput at a modest price.

  • nwl860

    NWL-860

    IC Inspection wafer loader capable of handling 6 and 8-inch (150 and 200 mm) wafers.

  • nwl641

    NWL-641

    IC inspection wafer loader for 4, 5 and 6-inch (100, 125 and 150 mm) wafers.

  • dart

    DART Software

    Semiconductor wafer inspection software offering features such as image archiving, defect review, post probe review and online communications.

  • nexiv-foup

    NEXIV FOUP

    Non-contact, fully automated wafer carrier measuring system.