Built upon Nikon's proven front end process technology, the OPTISTATION-3000 offers high-precision, ultra-fast inspection for 300mm wafers.
Its efficient transfer sequence, new robotic arm, FOUP opener, and enhanced macro observation functions all contribute to especially high yield rates—making the OST-3000 a high-throughput wafer inspection powerhouse. In addition, the system provides the highest system reliability in its class, using a safety design that complies with SEMI standards.
