Key Features
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Highlights
- Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments
- SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates
- Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes
- Laser AF provides fast, non-contact measurements of wafer positions
- Wide area, high-intensity LED illumination enables accurate measurements of wafer heights
- 300mm, 200mm wafer carrier and SMIF Pod base