Key Features
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DART Software
- Defect review (KLA, Tencor, & more) and inspection capabilities
- Wafer mapping (Electroglas, customer specific)
- Image archiving and retrieval
- GEM/SECSII, VARS, OCR and other interfaces
- Network compatible with Windows NT
- Works with all Nikon inspection systems, today and tomorrow
- Custom recipes for inspection and defect review
- Graphic and text views of data
- Real time video for viewing and image archiving
- Image retrieval with customized image folders for teaching and training
- Flexible screens that can be configured to fit your specific applications
- User defined privileges
- Multiple output formats including spreadsheets such as Microsoft Excel®
- Customized hardware and software solutions available

