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Nikon DART Semiconductor Wafer Inspection Software

Key Features

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DART Software

  • Defect review (KLA, Tencor, & more) and inspection capabilities
  • Wafer mapping (Electroglas, customer specific)
  • Image archiving and retrieval
  • GEM/SECSII, VARS, OCR and other interfaces
  • Network compatible with Windows NT
  • Works with all Nikon inspection systems, today and tomorrow
  • Custom recipes for inspection and defect review
  • Graphic and text views of data
  • Real time video for viewing and image archiving
  • Image retrieval with customized image folders for teaching and training
  • Flexible screens that can be configured to fit your specific applications
  • User defined privileges
  • Multiple output formats including spreadsheets such as Microsoft Excel®
  • Customized hardware and software solutions available

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