Overview
Advanced, cost-effective automated wafer inspection and review software.
DART Wafer Inspection Software is an integrated software package that can fully automate the inspection process. It allows users to recall, review and classify defects based upon an integrated graphical map. Ideal for use with Nikon Optistation and NWL wafer loader systems, DART automatically controls all routine functions, including programming and point-to-point/die-to-die inspection.
Categories: Software
Applications: Wafers
