LV-DAF Specifications
| Detection system: | Hybrid system combining slit projection with contrast detection |
|---|---|
| Auto-focus light source: | Near-IR LED (λ = 770 nm) |
| Objective lens: | CFI60 objective lens 2.5x-100x (includes extra-long working distance (ELWD), super-long working distance (SLWD), and CR for LCD substrate inspection) |
| Auto-focus modes: | Continuous mode and search mode (single, continuous) |
| Focal range: |
Focal range without searching (brightfield)² 2.5x: 5.5 mm or more, 5x: 4.5 mm or more, 10x: 1.3 mm or more, 20x: 320 μm or more, 50x: 50 μm or more, 100x: 10 μm or more |
| Focal time: | 0.7 seconds or less (20x: 200μm with no search)² ³ |
| Focal precision (repeated reproducibility): | 1/2 or less of focal depth² ³ |
| AF offset feature: | Enables observation with precise adjustment of focal position while applying auto-focus |
| Minimum drive resolution: | 0.05 μm¹ |
| External communication: | RS232C, USB, and parallel I/O |
| Power source: | 100-240 V AC, 1.0 A, 50/60 Hz |
¹ Some limitations for 2.5x and 100x.
² Using Nikon’s standard Cr vapor deposition sample.
³ Using the LV-IMA or LV-FMA.
