L300: Episcopic Illumination Type

• Maximum sample size: 300mm wafers

• Stage stroke: 354 x 302mm

• Magnification range: 15x – 2000x (depends on eyepiece and objective)

L300D: Diascopic/Episcopic Illumination Type

• Maximum sample size: 17-inch flat-panel displays (FPD)

• Stage stroke: 354 x 302mm (diascopic illumination range: 354 x 268mm)

• Magnification range: 15x – 2000x (depends on eyepiece and objective)

The newly developed darkfield illumination optics dramatically enhance image brightness and improves detection capability of minute scratches and topographies within a sample.

Nikon's CFI60 system – a successful merger of the CF optical system with infinity optics – contributes to bright, high-contrast images.

The L300/300D adopts a single prism (Senarmont) system, which enables DIC observations at all magnifications by simply inserting a single Nomarski prism into the nosepiece. DIC images are clear and crisp with minimal color shades, even at low magnifications. A high-contrast-type DIC slider permits the formation of DIC images with greater sensitivity.

The L300/L300D complies with Semiconductor Equipment and Materials International (SEMI) guidelines for safety (S7-0703) and ergonomics (S8-1103). As the eyepiece is positioned closer to the operator, the stage does not touch the operator even when it is moved toward him or her, ensuring safe, comfortable viewing.

Electrostatic-discharge coatings have been applied to the body, stage, eyepiece tube (L2-TT2 type), and various controls. This strengthens safeguards against contamination and prevents damage to samples induced by electrostatic, thus contributing to higher yields.

The X-Y fine movement control remains in the same position close to the operator, making it unnecessary for the operator to extend his or her arm to move the stage. Because moving the specimen and focusing can be carried out with one hand resting on the desk, the operator can focus on observation.

The main control knobs and buttons are located in the front of the base to allow quick, easy operation while viewing samples, and minimize fatigue during lengthy observations.

The focusing target moves easily in and out of the optical path to allow easier focusing on low-contrast samples such as bare wafers.

Taking advantage of the 60mm parfocal distance, the new series provides longer working distance while maintaining higher numerical aperture. The CFI60 offers both image brightness and ease of operation. Furthermore, optical centricity has been improved to minimize image shifts that might occur when changing the objective magnification.

The tilting trinocular eyepiece tube is the ultra-widefield FOV 25mm type. The eyepiece angle can be set between 0° and 30°, allowing users to set their optimum eyepoint level to ensure comfortable viewing posture. Two types are available offering different observation/photo optical path ratios: L2-TT2 (100:0 / 20:80) and L2-TT (100:0 / 0:100).

To minimize flare, Nikon has applied special coatings to the objectives and formed their surfaces to prevent stray light. Nikon has further reduced the chance of flare by cutting the number of reflections inside the eyepiece tube, achieving high contrast never before possible.

The L300 series utilizes the CFI60 optical system – a fusion of Nikon's renowned CF design and the excellent performance of the Nikon infinity optics. The CFI60 offers high resolution, contrast and transmittance, and provides the world's highest level of optical performance. Image brightness has been dramatically improved compared to conventional microscopes, making the new series suitable for various kinds of inspections.

The built-in nosepiece is a universal motorized sextuple type with three centerable slots. Image shifts that occur during magnification change can be minimized by using objectives with improved centricity and a nosepiece with a centering function. Illumination is also momentarily cut to protect the operator's eyes when the nosepiece is rotated.