Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.
Products
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Eclipse L200N Series
200mm wafer and mask inspection microscope systems for reflected light defect identification.
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Eclipse L300 Series
300mm wafer and mask inspection microscope systems for reflected light defect identification.
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Eclipse LV-DAF
Dynamic Auto-Focus unit that brings fast, versatile auto-focus to the Eclipse LV semiconductor inspection microscope series and OEM applications.
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Eclipse LV150 Series
Modular reflected light microscope systems for wafer inspection and materials science applications.
Metallurgy, Microelectronics, Metal Manufacturing, Medical Devices, MEMS…
