Optistation-V Specifications
| Wafer Size/type: | 8, 6, 5 in. (200, 150, 125 mm) (SEMI/JEIDA standards) 4 in. (100 mm) (option) |
|---|---|
| Microscope (micro) observations : | Total magnification - 20 to 3,000X; Observation modes - Brightfield, darkfield, Nomarski DIC, confocal (CF1, CF2); Illumination - Precentered lamphouse (12V-100W halogen lamp); High intensity lamps available as options. Power coherent illumination (150W metal halide light source, option) |
| Eyepiece tubes: | Tilting trinocular eyepiece tube |
| Auto focus: | LED illumination slit projection |
| Nosepieces: | Motorized BD quintuple nosepiece (standard); Motorized DIC quintuple nosepiece (option) |
| Objectives: | CF? objectives for CF Infinity Corrected optics, e.g. Epi Plan, Epi Plan Apo, BD Plan, BD Plan Apo series |
| Option: | Confocal microscope unit |
| Macro observations (option): | Rotation angle - 360° X/Y axes tilt - 0 to ?25, Backside observation (option); Macro illumination - Fiber illumination (halogen light source); Slit fiber and other options available |
| High precision stage: | Stage travel (X-Y) 208 x 208 mm (8.2 in. x 8.2 in.) (observation area) |
| Observation points: | Unlimited |
| Wafer transport: | Number of elevators - 2, supports SMIF indexers (option); Elevator loading position - Front (standard); Transfer - Robotic handling by dual feeder arm and multi-rotary arm; vacuum chuck; non-contact pre-alignment; Functions - Sampling allocation. |
| Controller: | Windows NT® |
| Communication with host computer: | GEM/SECSII (option) |
| Dimensions (WxDxH), and weight (approx.): | 1350 x 900 x 1446mm (53.1 x 35.4 x 56.9 in.), 360 kg (790 lbs.); 995 x 1,000 x 1,200mm (39.2 x 39.4 x 47.2 in.), 290 kg (639 lbs.) (Including vibration isolation table) |
| Vacuum rate: | -800hPa (-600 mmHg) or less, flow rate 30 nl/min. or more |
| Power supply: | 100 to 115V/220 to 240 AC ±10%, 15A max. |
| Operating temperature: | 23° C (73° F) ±3° C (5.4° F) |
| Operating humidity: | 50 - 20% RH |
