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Nikon Optistation-V Wafer Inspection System

  • Optistation-3000 Wafer Inspection System
    Optistation-3000

    An inspection system and analysis tool for R&D defect analysis delivering high-speed transfer and system stability.

    Wafers

  • Optistation-3100 Wafer Inspection System
    Optistation-3100

    Compact, cost-effective solution for 300mm wafer inspection in diverse applications.

    Wafers

  • Optistation-7
    Optistation-7

    300mm inspection station delivering high precision, throughput, accuracy and ease of use.

    Wafers

  • Optistation-3200
    Optistation-3200

    300mm wafer inspection system featuring Nikon's renowned CFI60 optics and newly designed DUV microscope.

    Wafers

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