Key Features
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Highlights - Optistation V
- Small footprint and high throughput decreases cost of ownership.
- User friendly operating environment. The Optistation V incorporates the powerful and expandable DART software for the ultimate control of wafer inspection systems.
- Dual feeder arms and rotating triple arms are used in the transfer system to achieve high throughput.
- A clean transfer system suppresses contamination. SMIF is supported (available as an option).
- 125, 150, and 200mm (5, 6, 8 in) wafers can be transferred and inspected. (100 mm (4 in) support is available as an option)
- Full range of optical techniques. Accommodates brightfield, darkfield, Nomarski DIC as well as confocal observation.
- Image archiving, GEM/SECSII, VARS option.
