Optistation-3200 Specifications
| Wafer size: | OD 300mm |
|---|---|
| Microscope (micro) inspection: | Total magnification: 25x to 1500x; Inspection modes: Brightfield, Darkfield, DIC (option), DUV (option); Autofocus: LED illumination slit projection; Objectives: CFI60 objectives |
| Macro inspection: | Surface Macro, center backside Macro, perimeter backside Macro |
| Load port: | 2 FOUP; Position selectable from side or rear |
| Wafer transfer: | Robotic handling; vacuum chuck; noncontact pre-alignment mechanism |
| Options: | DUV microscope: Hg-Xe lamp type (248nm); Online operation: Via SECS-I or HSMS; Others: Video capture function, 2nd user interface (UIF), OHV (SEMI E84 compliance), Review inspection, ADC, OCR |
| Safety: | S2-0302 compliance, CE marking compliance |
| Ergonomic: | S8-0701 compliance |
| Dimensions (W x D x H): | 1625 x 2500 x 2300mm; (Rear load port) (64.0 x 98.4 x 90.6 in.) |
