Available in Americas only
Overview
Redefining 300mm wafer inspection with Nikon's CFI60 optical design.
One of Nikon's most advanced and versatile semiconductor inspection systems, the Optistation 3200 provides three-mode macro inspection capability – front, backside center, and backside perimeter – as well as high performance lighting techniques that allow for detection of a wide variety of process defects and particle/scratch detection.
Categories: Semiconductor Equipment
Applications: Wafers
