Optistation-3100 Specifications
| Wafer size: | 300mm |
|---|---|
| Microscope (micro) inspection: | Total Magnification: 25x to 1500x; Inspection modes: Brightfield, darkfield, DUV (option); Autofocus: LED illumination slit projection; Objectives: CFI60 objectives |
| Macro inspection: | Surface Macro, center backside Macro, perimeter backside Macro |
| Load port: | 1 foup (or 1 FOSB: option); Position selectable from front, side or rear |
| Wafer transfer: | Robotic handling; vacuum chuck; noncontact pre-alignment mechanism |
| Operation: | Touch panel GUI, mouse, keyboard |
| Options: | DUV microscope: Switchable to B/D; Online operation: Via SECS-I or HSMS; Communication with host computer: 300mm SEMI standards (Complaint with E5, E7, E30, E37, E39, E40, E87, E90, E94); Others: FOSB compliance, ULPA boronless FFU (fan filter unit), Video capture function, 2nd user interface (UIF), OHV (SEMI E84 compliance), Review inspection, ADC, OCR |
| Safety: | S2-0200 compliance, CE marking compliance |
| Ergonomic: | S8-1000 compliance |
| Dimensions (W x D x H): | 1785 x 1650 x 2300mm; Rear load port: 70.1 x 65.0 x 90.6 in. |
| Weight: | Main body: Approx. 760kg (1676 lb); FFU unit: Approx. 160kg (353 lb) |
