The NWL-860 series uses a dialog-type operating system with an LCD panel, in which display information is logically classified, allowing settings for each step to be made easily on a single screen. Sophisticated functions such as file management for cassettes and wafer samples further enhance operational ease. A dedicated input keypad for setting inspection processes and programming wafers to be checked is also available as an option.

Besides pattern side macro inspection, the NWL-860 series can perform back side perimeter and center macro inspections. Macro inspection parameters, such as wafer rotation speed and tilt angle, can be preset or adjusted manually. Use the macro setting knobs to preset initial settings and make later adjustments using the joystick during the inspection process.

Should an error occur, an error message appears on the LCD panel directing the technician to the exact problem. In the event a quick recovery is not possible, the wafer recovery feature offers a safe and reliable way to bring the wafers back to the cassette. Even in a loss of power condition vacuum remains on, preventing the wafers from falling in any position. For even greater safety, the SP and INX models both feature an emergency off switch.

A data communication function conforming to SEMI (SECS) standards can be added optionally, enabling transfer of inspection data via the RS-232C interface or operation and recipe writing by remote control. This proves handy when expanding the system or incorporating it into a total network.

Not only is the speed of the elevator surprisingly fast, but the use of a non-contact centering mechanism makes it possible to perform alignment operations quickly and accurately. A multi-arm system also allows loading and unloading of wafers with the utmost precision, increasing the overall efficiency of transfer and wafer exchange operations. This dramatically decreases cycle times, providing levels of throughput never seen before in any other system.

To assure operation in a natural posture, ergonomics surround every aspect of this system's design. Operation keys and knobs are located at the front and close to the operator, so that operation requires a minimum movement of the hand or eye. The wafer cassette is set at the front and 35° to the left of the operator, enhancing cassette setting and streamlining visual wafer inspections.