The NWL-641 has been discontinued.
NWL-641 Specifications
| Wafer Size: | 6, 5 and 4 inches |
|---|---|
| Wafer Cassette: | Fluoroware H-BAR type housing |
| Number of Wafers: | 25 Wafers |
| Inspection Mode - NWL-641: | Micro Inspection |
| Inspection Mode - NWL 641M: | Micro Inspection and Tilt Macro Inspection |
| Wafer Transfer: | Robotic transfer with vacuum chuck |
| Orientation flat/notch detection: | By transmitted type sensor, Wafer angle before and after inspection can be specified in increments of 90° |
| Stage: | Dedicated stage (rotatable 360°, with vacuum chuck) |
| Dimensions and Weight: | NWL-641: 246 W x 655 D x 245mm H (9.7 W x 25.8 D x 9.6 in. H) - 21 kg (46.2 lb); NWL-641M: 266 W x 655 D x 245mm H (10.5 W x 25.8 D x 9.6 in. H) - 23.5 kg (51.7 lb) |
| Vacuum: | Pressure: - 600mm Hg (-80 kPa) or less, Displacement: 10nl/min. or more |
| Power Source: | AC 100V/120V + 10%, 50/60 Hz, 1.7A max.;AC 220V/240V + 10%, 50/60 Hz, 0.85A max. |
