AMI-3000 Specifications
| Wafer size: | 300mm |
|---|---|
| Throughput: | greater-than or equal to 150 wafers/hour |
| Major inspection items: | Exposure errors/defocusing defects, coating errors/uneven coating, developing errors, foreign particles, scratches, etc. |
| Dimensions: | 1417 (W) x 2503 (D) x 2430 (H) mm |
| Weight: | Approx. 1400kg |
| Safety standards: | Complies with SEMI S2-0200, S8-0701, CE marking. |
