Eclipse L200 Series Specifications
| Main Body: | Built-in Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control |
|---|---|
| Focusing Mechanism: | Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments) |
| Episcopic Illuminator: | 12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; polarizer; analyzer |
| Nosepiece: | Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided |
| Eyepiece Tube: | L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100) |
| Stage: | 8 x 8 Stage; stroke: 205 x 205mm; coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls |
| Eyepieces: | CFI eyepiece lens series |
| Objectives: | CFI60 LU/L Plan series |
| Weight: | 43.75 kg (96.45 lbs) when 8 x 8 stage and L2TT eyepiece tube are used |
| Compliance: | SEMI S2-93A, S8-95, CE, UL |
L200A
| Observation Method: | Brightfield, Darkfield, DIC, Simple Polarizing |
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| Main Body: | Episcopic Stand with attached Universal Nosepiece - Power Supply built-in |
| Focusing Mechanism: | Stroke: 29mm; Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided); Fine 0.1mm per rotation (in 1µm increments); Guide: 4-guide (two roller-race, torque adjustable) |
| Episcopic Illuminator: | Motorized aperture diaphragm (centerable, pinhole slider incorporated); fixed field diaphragm (with focus target); four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Polarizer; Analyzer |
| Light Source: | 100W Halogen - 100W Mercury - 75W Xenon - 150W Metal Halide |
| Eyepiece Tube: | UW Tilting Trinocular Eyepiece Tube (tilt angle 0-30°, erect images); F.O.V.: 25mm; Optical Path Changeover: 2-way (Binocular: Photo 100:0/0:100) |
| Nosepiece: | Fixed-Motorized Sextuple Universal Nosepiece (centerable), highly durable |
| Stage: | 8 x 8 Stage; Cross Travel: 205 x 205mm, Coarse/line-movement changeover: manual; wafer holders: 5-8 inch, Mask Holders 5-6 inch |
| Control: | Front Panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, light intensity control knob; Remote Control: LCD panel, magnification changeover, motorized z-axis, episcopic aperture diaphragm stop buttons, light intensity control knob, motorized bright/darkfield changeover key, DIC adjustment knob, option keys |
| Eyepieces: | CFI Eyepiece Lens Series |
| Eyepieces: | CFI Eyepiece Lens Series |
| Objectives: | CFI LU/L Plan Series |
| Auto Focus Unit: | Optional (LED) |
| Communication: | RS-232C |
| Weight: | Approximately 45 kg (when 8 x 8 Stage and UW Eyepiece Tube are used) |
| Compliance: | SEMI S2-0200, S8-0600, CE, UL |
L200D
| Main Body: | Built-in Diascopic and Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control; episcopic/diascopic changeover |
|---|---|
| Focusing Mechanism: | Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments) |
| Episcopic Illuminator: | 12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16 and GIF) can be mounted; polarizer; analyzer |
| Diascopic Illuminator: | 12V/100W halogen lamp light source built-in; aperture diaphragm and LWD condenser built-in |
| Nosepiece: | Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided |
| Eyepiece Tube: | L2TT ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100) |
| Stage: | 8 x 8 Stage; stroke: 205 x 205mm (diascopic observation range: 150 x 150mm); coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls |
| Eyepieces: | CFI eyepiece lens series |
| Objectives: | CFI60 LU/L Plan series |
| Weight: | 44.45 kg (97.99 lb) when 8 x 8 stage and L2TT eyepiece tube are used |
| Compliance: | SEMI S2-93A, S8-95, CE, UL |
