Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.
Products
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Eclipse L300 Series
300mm wafer and mask inspection microscope systems for reflected light defect identification.
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Eclipse L300N Series
300mm wafer and mask inspection microscope systems for reflected light defect identification.
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Eclipse L200N Series
200mm wafer and mask inspection microscope systems for reflected light defect identification.
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NWL200
Advanced IC inspection wafer loader capable of loading 100µm thin wafers.
