BW-H501 Specifications
| Optical Microscope Unit | Nikon LV100, MM, AZ Series Microscopes |
| Controller Unit | Focuscope FCV100C |
| Computer | Dell P390 Equivalent or Higher |
| Monitor | Dell TFT 20" Monitor |
| Software | BridgeElements |
| Objective Lens | Two Beam Interference Objective Lens (Standard Configuration: 20x, other option |
|
Observation and Measurement Range Horizontal (H) μm Vertical (V) μm Working Distance (mm) Numerical Aperture (NA) |
. 2.5x 5x 10x 20x 50x 100x 3160 1580 790 395 159 79 3160 1580 790 395 159 79 10.3 9.3 7.4 4.7 3.4 2.0 0.075 0.13 0.3 0.4 0.55 0.7 |
| Measurement Optical System | White Light Interferometry |
| Height Measurement |
Effective Resolution: 0.1μm Indicating Resolution: NA Reproductive Accuracy σ: 0.01μm |
| Height Measurement Time | 0.2 second/field |
| Height Measurement Range | 40μm |
| Correction | Plane Correction, Quartic Curve Correction |
| Digital Enlargement | 1/100 Sub-pixel Processing |
| Roughness Measurement | 2-Dimensional Roughness; 3-Dimensional Roughness |
| Profile Display | Cursor Measurement of Distance Between Two Points, Cursor Measurement of Height Between Two Cursor Points |
| Output | Output of Processed Images and Roughness Indices to an Excel File |
| Automatic Processing | Automatic Processing of Multiple Height Images |
| Three Dimensional Display | With MS Direct X |
| Height Calibration | Made by VLSI Standard Inc., Standard Step Sample (Optional Part) |
