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NEXIV VMR-3020 Specifications

Stage Stroke (Xx Yy Zz) (Standard): 300 x 200 x 150mm (11.8 x 7.9x 5.9) in
Minimum readout: 0.1 µm
Maximum work piece weight: 20kg (44.0 lb)
Measuring accuracy at 20C+/-0.5K:
U1x U1y: 1.5 + 4L/1000 µm
U2xy (Standard): 2.5 + 4L/1000 µm
Z-axis guide accuracy: (1.5+L/150) µm
Camera: B/W Progressive Scan camera or color CCD camera
Maximum specimen height (Standard): 150mm
Objective Working Distance: Type 123=50mm, z120x=hi mag. 9.8mm, low mag. 32mm
Zoom Head Magnification and Field of View: Type 1: 0.5- 7.5x, 9.33 x 7.00mm - 0.622 x 0.467; Type 2: 1- 15x, 4.67 x 3.50mm - 0.311x 0.233mm; Type 3: 2 - 30x, 2.33 x 1.75mm - 0.155 x 0.117mm
Auto Focus: (TTL)Through the lens laser and video auto focus
Power Source: AC 100 to 240 V ±10%, 50/60 Hz
Power Consumption: Approximately 7A
Dimensions and Weight:
Main Body Only: 500(W) x 690(D) x 1195(H) mm, 160kg; 19.7(W) x 27.2(D) x 47(H) in., 352.7lb
Main Body & Table: 690(W) x 730(D) x 1725(H) mm, 200kg; 27.2(W) x 28.8(D) x 67.9(H) in., 440.9lb
Controller: 250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19.7(H) in., 44.1lb
Foot Print: 2100(W) x 1100(D) mm; 82.7(W) x 43.3(D) in.
Host Computer:
Main unit: PC Core 2 Duo (Windows XP SP2)
Monitor: 19-inch LCD (USA)

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