Nikon Instruments / Products / Measuring Systems / Vision Systems / NEXIV VMR-3020

Key Features

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Type 1,2,3 Models

  • 3 models (type: 1, 2, 3) with 5-step zoom magnification to cover different fields of view and resolution requirements
  • Long working distance (50mm) permits measurement of parts with large height variances
  • 300 X, 200 Y mm travel, with cast Mehanite stage of 150mm Z
  • Programmable dual white LED illuminator rings
  • A variety of illumination choices facilitates accurate detection of edges in molded parts
  • 15x zoom provides wide field of view for rapid search and high magnification for precise measurement. Accurate calibration at all magnifications allows rapid field of view measurements of multiple parameters
  • Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black & white CCD camera
  • User-friendly and versatile VMR Automeasure software includes: CAD reader, offline programing, profiling software and programing wizards
  • Laser AF enables cross-sectional shape and flatness evaluation as well as 3D profiling
  • Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.
  • Ideal for semiconductor packages, substrates, stamped parts, connectors, injection molded parts
  • Superior performance for medical devices
  • Optional Computer System B with the Cognex CX imaging card allows image rotation with pattern recognition for samples like Mulit-Lumen tubing (which can be oriented in any direction)

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Z120X Model (with Maximum Magnification Module)

The NEXIV VMR-3020 maximum magnification module achieves measurements of finely machined workpieces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages.

  • The combination of the maximum magnification module and high-precision stage enables accurate measurements of large geometry workpieces as well as minute structures
  • Laser AF uses small spot size to provide accurate measurements of finer cross-sectional shapes and heights
  • Optional surface analysis software displays 3D shapes of MEMS parts

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LU Model (universal epi-illuminator/motorized nosepiece)

  • Full range of Nikon CFI60 LU microscope objectives from 5x to 150x
  • Supports brightfield, darkfield, DIC, simple polarizing applications
  • Motorized quintuple universal nosepiece
  • Easy to use software controls all functions of the system

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