Key Features
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Type 1,2,3 Models
- 3 models (type: 1, 2, 3) with 5 step zoom magnification to cover different fields of view and resolution requirements
- 6 x 6 travel
- 150 X, 150 Y mm travel, and cast Mehanite stage with 150mm Z
- A long 50mm working distance sufficiently supports measurements of 3D workpieces
- 15x zoom provides wide field of view for rapid search and high magnification for precise measurement. Accurate calibration at all magnifications allows rapid field of view measurements of multiple parameters.
- High-speed TTL Laser AF ensures high-precision AF independent of surface shape (NEXIV VMR-1515 Performa models have only Vision AF, no Laser AF).
- Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.
- Ideal for Semiconductor packages, Substrates, Stamped parts, Connectors and small parts, Clock parts
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Performa Model
Performa is Nikon's most economical model. Features a 6 x 6 travel and has all the same features as the standard VMR-1515 without Laser AF & Outer LED ring illuminator.
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Z120X Model (with Maximum Magnification Module)
- 120x optical magnification enables measurements of fine line widths
- High-precision TTL Laser AF features high NA and enables measurements of small height gaps
- Perfect for measurements of high-density, finely-machined workpieces
- Optional Bird's-Eye View software plots MEMS parts in 3D format
- Ideal for small high-density PCBs, small precision dies and molds, packages (2D + height), MEMS parts
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LU Model (universal epi-illuminator/motorized nosepiece)
- Full range of Nikon CFI60 LU microscope objectives from 5x to 150x
- Supports brightfield, darkfield, DIC, simple polarizing applications
- Motorized quintuple universal nosepiece
- Easy to use software controls all functions of the system
- Ideal for small-size LCDs, organic EL panels, wafers up to 150mm
